Anatoli V. Melechko

Digital electrostatic electron-beam array lithography

Baylor, L.R., D.H. Lowndes, M.L. Simpson, C.E. Thomas, M.A. Guillorn, V.I. Merkulov, J.H. Whealton, E.D. Ellis, D.K. Hensley, and A.V. Melechko

Journal of Vacuum Science & Technology B, 2002. 20(6): p. 2646-2650.

 

 

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Reused with permission from L. R. Baylor et al, Journal of Vacuum Science & Technology B, 20, 2646 (2002). Copyright 2002, AVS The Science & Technology Society.